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The core of the system, integrating the above-mentioned purification technologies.

Delivers purified gas to the point of use without contamination. Key features include low-outgassing materials such as 316L stainless steel, electropolished (EP) internal surfaces, and automatic orbital welding to ensure zero leakage at connections.

Monitors purity and flow in real time. PLC (Programmable Logic Controller) is commonly used for fully automatic operation, safety interlocking, and exception handling.

Such as UHP gas control panels and valve manifold boxes (VMB), which precisely supply gas to specific equipment.