HPC® VMB/VMP series semi-automatic valve manifold boxes are utilized in the semiconductor industry for the distribution of specialized gases from the main pipeline to various process equipment. Each branch line can independently control the corresponding process equipment, allowing for convenient and straightforward control of gas supply to each branch via on/off buttons. The valve fittings are all made of 316L stainless steel, with an internally surface treated with EP to meet the requirements for ultra-high purity gas delivery. The electrical control complies with industrial electrical safety standards and electromagnetic compatibility specifications, while the cabinet meets explosion-proof requirements.
Series | Control Type | Gas Type | System Specification | Number of Outlets | Number of Outlets |
VMB | 11 | SiH4 | 4 | 2 | 4 |
VMB Valve Manifold Box VMP Valve Manifold Panel | 11：Semi-Auto 12：Manual | SiH4 NH3 H2 N2 … … | 4：1/4” 6：3/8” 8：1/2” | 4：1/4” 6：3/8” | 4:4 export 6:6 export Unspecified defaults to 4 outlets. |
Provide fast and personalized services.
Achieve automation, reduce labor costs and production losses.
Improve your productivity with comprehensive process monitoring to ensure stable production operations.
Higher precision and superior surface finish to enhance your product quality./p>
Intelligent design reduces safety risks.
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