GC/GR series gas cylinder cabinets are suitable for supplying small-flow process gases in the semiconductor industry. The dual-bottle automatic switching can achieve continuous gas supply.Intelligent control is achieved through the HMI with touch screen operation,the pressure detection function is complete, and the work indication is intuitive. The valve fittings are all made of 316L stainless steel material, meeting the requirements for ultra-high purity gas transmission. The electrical control complies with industrial electrical safety specifications and electromagnetic compatibility specifications, and the cabinet body meets explosion-proof requirements.
Series | Control Type | Gas Type | System Specification | Number of Outlets |
GC | 11 | SiH4 | 4 | 2 |
GC gas cylinder cabinet | 11: Two bottles, fully automatic 12: Two bottles, semi-automatic | SiH4: Silane NH3: Ammonia H2: Hydrogen ... ... | 4: 1/4" system 6: 3/8" system | Blank: Single outlet 2: Double outlets 3: Triple outlets |
Series | Control Type | Gas Type | System Specification | Number of Outlets |
GR | 11 | N2 | 4 | 2 |
GR gas cylinder cabinet | 11: Two bottles, fully automatic 12: Two bottles, semi-automatic 13: Single bottle, manual | N2: Nitrogen Ar: Argon He: Helium ... ... | 4: 1/4" system | Blank: Single outlet 2: Double outlets |
Provide fast and personalized services.
Achieve automation, reduce labor costs and production losses.
Improve your productivity with comprehensive process monitoring to ensure stable production operations.
Higher precision and superior surface finish to enhance your product quality./p>
Intelligent design reduces safety risks.
*Note: Please ensure that all information is filled in accurately and that your contact channels remain available. We will get back to you as soon as possible!
