Impurity removal depth: <0.005–0.1 PPB
Processing capacity: 10–20,000 NM³/H
Purification Products | impurity ppbv | ||||||||||
Gas | Series | Process | O2 | H2O | CO | CO2 | H2 | NMHC | CH4 | N2 | Ar |
N2 | PNO | CAT+Absorb | <0.1 | <0.1 | <0.1 | <0.1 | <0.1 | <0.1 | <0.1 | － | － |
N2 | PN | Absorb | <0.1 | <0.1 | <0.1 | <0.1 | <0.1 | <0.1 | － | － | － |
H2 | PH7-H | Absorb+Getter | <0.1 | <0.1 | <0.1 | <0.1 | － | <0.1 | <1 | <1 | － |
H2 | PH7-L | Cryoadsorption &Palladium Membrane | <0.1 | <0.1 | <0.1 | <0.1 | － | <0.1 | <0.1 | <0.1 | <0.1 |
O2 | PO | CAT+Absorb | － | <0.1 | <0.1 | <0.1 | <0.1 | <0.1 | <1 | － | － |
He/Ar | PE/R | Absorb+Getter | <1 | <1 | <1 | <1 | <1 | <1 | <1 | <1 | － |
Purification Products | impurity ppbv | |||||||||||
Gas | Series | Process | O2 | H2O | CO | CO2 | H2 | CH4 | Acids | Bases | Refractory compound | Organics |
NH3 | PNH | Absorb | <1 | <1 | － | <1 | － | － | － | － | － | － |
XCDA | PX | Absorb | － | <0.1 | － | － | － | － | <0.01 | <0.01 | <0.01 | <0.01 |
CO2 | PCO | CAT+Absorb | <1 | <1 | <1 | － | <1 | <1 | <0.005 | <0.5 | <0.005 | <1 |
PC | Absorb | <1 | <1 | <1 | － | <1 | － | <0.005 | <0.5 | <0.005 | <1 | |
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