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Large-diameter Cleanroom Valve

Suitable for pipeline control in the semiconductor gas industry. The valve features high-quality stainless steel bellows sealing technology, effectively eliminating internal and external leakage to ensure long-term stable operation.

Applications

● Semiconductor industry
● Ultra-high purity valve field

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Product Specifications

Model (caliber)	Adaptive media	Work pressure	Temperature range	Service life	Purity level	Connection form	Core application scenarios
1/2 inch pneumatic bellows globe valve	N₂, O₂, CO₂, He, Ar and other non-corrosive high-purity gases	15bar	-29~350℃	1,200 cycles / 15 years (Whichever comes first)	BA (bright annealed) / EP (electrolytic polishing)	welding	Low-flow high-purity gas lines (e.g., auxiliary gases for lithography processes)
3/4-inch pneumatic bellows shut-off valve	Same as above	15bar	-29~121℃	20,000 opening and closing times/15 years (Whichever comes first)			Medium flow high purity gas pipeline (such as oxidation, diffusion process)
1 inch pneumatic bellows globe valve	Same as above	15bar	-29~121℃	20,000 opening and closing times/15 years (Whichever comes first)			Large flow high purity gas pipelines (such as bulk gas transmission main pipelines)

Testing standards: The entire series has passed API 598 valve leakage test, helium mass spectrometry leak detection (leak rate ≤1×10⁻⁹atm·cm³/sec), and customized testing requirements.

Core Advantages

Leak-Proof Design Ensures Production Safety

Extensively validated under long-term operating conditions, the valve maintains zero leakage even under temperature fluctuations from -29°C to 350°C and pressure variations up to 15 bar. This prevents high-purity gas waste (reducing gas loss by 15%–20% annually) while also preventing external contamination, thereby ensuring safe production.

Strong Adaptability for Multiple Scenarios

With a size range of 1/2 to 1 inch, the valve covers small to large flow requirements for high-purity gas lines in semiconductor applications. The welded connection ensures stable and reliable performance. It is compatible with various non-corrosive gases, including nitrogen purge gas, oxidation gases, and He/Ar carrier gases, meeting the gas control requirements across all process steps such as lithography, etching, and deposition.

Flexible and Convenient Operation

Equipped with two valve operation modes: pneumatic cylinder or handwheel. During normal production, automated high-frequency opening and closing (up to 1 cycle per second) can be achieved via the pneumatic cylinder. For conditions where automated high-frequency operation is not required, the handwheel configuration can be selected.

Low-Maintenance Design for Cost Reduction

By replacing traditional O-ring seals, the need for periodic seal replacement is eliminated, reducing maintenance frequency by over 60%. With a service life of up to 15 years—compared to conventional valves averaging 5–8 years—replacement costs are cut by 50%, and total operating costs are reduced by 40%.

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Reduce costs

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Improve production efficiency

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Worry-free production

Intelligent design reduces safety risks.

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